Hi Vivek Prabhu, I have done some work on with Au/Si and on heaters. If you want to have an easy reaction between Au and Si the interface should be clean. For a layer of Si/Cr/Au the "Cr" layer is an adhesion layer, but probably also retards the reaction between Si and Au (diffusion barrier). If you are trying to bond the Si/Cr/Au wafer to another Si, be careful about the native oxide on the other Si. Les Allen *********** Au-Si ******************* L.H. Allen, J.W. Mayer, K.N. Tu, and L.C. Feldman, "Kinetics of Si recrystallization in the Au/Si", Phys. Rev. B. 41, 8213 (1990) ** L. H. Allen, G. Ottaviani, C.B. Carter, J. W.Mayer, "2-D Si growth during thermal annealing of Au/Si System", Phys. Rev. B. 41, 8203 (1990) ******************* Heaters ************* L. H. Allen, G. Ramanath, S. L. Lai, and Z. Ma. "1,000,000 degrees C/s thin film electrical heater: in situ resistivity measurements of Al and Ti/Si thin films during ultra rapid thermal annealing", Appl. Phys. Lett. 64, 417 (1994). ******************* Heaters/Calorimeter ************* S.L. Lai, J.Y. Guo, V. Petrova, G. Ramanath and L.H. Allen, "Size-dependent melting properties of small tin particles: nanocalorimetric measurements", Phys. Rev. Lett. 77, 99 (1996) S.L. Lai, G. Ramanath, L.H. Allen, P. Infante and Z. Ma, "Heat capacity of Sn nanostructures via a thin-film scanning calorimeter", Appl. Phys. Lett. 70, 43 (1997). S. L. Lai, G. Ramanath, L.H. Allen, P. Infante and Z. Ma, "High-speed (10/sup 4/ degrees C/s) scanning microcalorimetry with monolayer sensitivity (J/m/sup 2/)" Appl. Phys. Lett. 67, 1229 (1995). **************** Wafer Bonding ************** Z. Ma, T.C. Shen, G. Zhou, H. Morkoc and L. H. Allen, "Wafer Bonding For Hybrid Circuit Technology using Solid State Reactions", MRS Proc. 314, 241-245 (1993) ***** Z. Ma., Zhou, Morkoc, Hsieh, and L.H. Allen, "Solid-state Low Tempertaure Bonding: Si to GaAs & InP," Appl. Phys. Lett. 64, 772-774 (1994) ********************************************** * Leslie H. Allen, Associate Professor * * Materials Science Department * * University of Illinois at Urbana * * 1304 West Green St. * * Urbana, IL 61801 * ********************************************** TEL: (217) 333-7918 FAX: (217) 244-1631 e-mail: l-allen9@uiuc.edu