Use organ gas plasma etch after resist patterning. Alumina can be etched
using organ gas plasma.
Gautham at absara@singnet.com.sg

----- Original Message -----
From: ":(): oxxxxxx|" 
To: 
Sent: Thursday, May 22, 2003 11:49 PM
Subject: [mems-talk] Alumina/ss


>   hi.
>
>   I depositing a alumina thin film on the surface of Stainless Steel. I
tried to have a look of the cross section. Anybody can tell me how to etch
it?
> --
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