Hi Sorry for the error. it is Argon gas.
----- Original Message -----
From: "Absara Micro Systems" 
To: "General MEMS discussion" 
Sent: Tuesday, May 27, 2003 11:37 AM
Subject: Re: [mems-talk] Alumina/ss


> Use organ gas plasma etch after resist patterning. Alumina can be etched
> using organ gas plasma.
> Gautham at absara@singnet.com.sg
>
> ----- Original Message -----
> From: ":(): oxxxxxx|" 
> To: 
> Sent: Thursday, May 22, 2003 11:49 PM
> Subject: [mems-talk] Alumina/ss
>
>
> >   hi.
> >
> >   I depositing a alumina thin film on the surface of Stainless Steel. I
> tried to have a look of the cross section. Anybody can tell me how to etch
> it?
> > --
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