Hi Mahdu,

Try dilute HF (1: 40). On the wafers that I have, there are NiFe structures,
I etch 200 Angstrom of Titanium around these structures and the NiFe is not
affected by the etch (around 20 seconds)

Best of luck

Magali

--
Energy Processing for ICT
NMRC, Lee Maltings, Cork, Ireland

Tel: +353 (0)21 4 904279
Fax: +353 (0)21 4 270271

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of madhulika sathe
Sent: 23 May 2003 17:42
To: mems-talk@memsnet.org
Subject: [mems-talk] Titanium etch



I am looking for an etch for Titanium that does not affect the following:

1:Nickel
2:Iron

Any help in this regard would be greatly appreciated.

Thanks in advance!

Madhu
LSU



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