Sreemanth,

I had Suss MicroTec make a few custom 3" chucks for about $1100 each.
They can be reached at 1-800-683-7877

Brent

Sreemanth M Uppuluri wrote:

> Hello All,
>
> I am looking for a vacuum chuck similar to the one found in mask aligners
> for performing contact lithography experiments. Please let me know if
> anyone has some information regarding it.
>
> Thanks
> Sreemanth
>
> ************************************************************
> Sreemanth M Uppuluri
> Graduate Research Assistant
> Center for Laser Micro-Fabrication
> School of Mechanical Engineering
> Purdue University
>
> Phone: 765-494-5638 (Office), 765-463-9560 (Home)
> Email: uppuluri@ecn.purdue.edu, sreemanth@hotmail.com
>
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