Bobo, It depends upon the pretreatment of the surface before the Shipley is applied. As an example if I used a bake plus a later HMDS treatment about 15 minutes was the maximum. I was etching 17,000 Angstroms of Sio2. With a vacuum vapor prime treatment it seemed to be limitless. Bill Moffat. -----Original Message----- From: bobo [mailto:xuemengchen@mail.sim.ac.cn] Sent: Monday, May 19, 2003 1:44 AM To: mems-talk@memsnet.org Subject: [mems-talk] how long can Shipley 4620 survive in BHF Hi, everyone, who knows how long can Shipley 4620 survive in BHF whithout be peel off? Thanks