durusmail: mems-talk: dry etching if TiNi.
dry etching if TiNi.
dry etching if TiNi.
vgupta@cs.sfu.ca
1997-09-09
 Hi Colleagues,

 I am looking for any information on
 "dry etching of TiNi(Shape Memory Alloy)".

 Any information will be appreciated.

 Thanks.

 Vikas Gupta


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