durusmail: mems-talk: Patterning elastomeric materials
Patterning elastomeric materials
1997-09-13
Patterning elastomeric materials
Adam Cohen
1997-09-13
Dear colleagues,

Is anyone by chance aware of an elastomeric (i.e., compliant, low modulus)
material that can be patterned (15-50 micron linewidths) in a thin layer,
either by UV curing, or else by etching through resist or other masking layer?

Any thoughts would be much appreciated.

Adam Cohen
USC/Information Sciences Institute


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