Hi Dlee,

   One method is to slightly change the mixing ratio between the two pieces.
  Make one piece with a higher ratio and the other with a lower ratio of a
certain ingredient. Then reheat both pieces together.  This should creat a
permanent bond between the two pieces.

Phil Tabada


>From: "Dlee Li" 
>Reply-To: General MEMS discussion 
>To: mems-talk@memsnet.org
>Subject: [mems-talk] PDMS irreversialbe bonding
>Date: Fri, 06 Jun 2003 17:17:07 +0000
>
>Hi,
>ths is dlee from Ut austin. I try to bond two piece of PDMS layer toghter
>with O2 RIE. The paramter is  O2 10sccm, 45 mtorr, 100watts. but bonding
>result is bad. I also try O2 20sccm, 70 mtorr and 75 watts, also the result
>is noy good. In my case, i need high strength bonding, at the least the
>bonding can stand 20-30 psi. I read some paper. It was said O2 RIE bonding
>can stand 50psi pressure. I am not sure what is wrong with my process.
>Anybody has suceed to achieve such good bonding strength (>30psi), any
>suggestion will be appreciated.
>
>Thanks
>Dlee
>Mechanical Engineering Department
>The University of Texas At Austin
>
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