Hi, I recently read an oblique reference to a problem with gold contamination of KOH and TMAH etchants used in anisotropic etching. Does anyone have a idea what the problem is ? Thanks, Ken Westra Ken Westra PhD Staff Scientist Alberta Microelectronic Centre # 318 11315 87 Ave Edmonton Alberta Canada T6G 2T9 Phone: 403 492 5570 ext 234 Fax: 403 492 1643