Hi Sukanta

You can use (KOH with IPA) or TMAH to etch Silicon. The
methods can be found in Marc Madou's book Fundamentals of
fabrication

good luck

anupama

> Hi
>   Can anybody help me how to do chemical etching of
> silicon.what  chemicals and at what solutions it should be
> used. please help
>
> sukanta
>
> Optoelectronics division
> SAMEER
> IIT powai campus
> mumbai-76
>
>
> sukanta Debbarma
> Scientific officer
> SAMEER,IIT Mumbai-400076
> ___________________________________________________
> Click below to experience Sooraj Barjatya's latest
> offering 'Main Prem Ki Diwani Hoon' starring Hrithik
> Roshan, Abhishek Bachchan & Kareena Kapoor
> http://www.mpkdh.com
>
>
> _______________________________________________
> MEMS-talk@memsnet.org mailing list: to unsubscribe or
> change your list options, visit
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing
> services. Visit us at http://www.memsnet.org/