Hello,

Our lab, along with others here at CMU, has for about a year been using
Whitesides' microcontact printing process for some of our bioMEMS work.
We've been fabricating our molds out of AZ4620, which works OK, but does
seem to have a tendency to delaminate from the substrate after the mold is
used a few times. I've noticed many people switching over to SU-8 for their
mold making, and I'd like to give this a try and see if it works better,
but I do not have much experience with that resist, and my impression from
reading MicroChem's literature and external websites is that it can be
tricky to process.

Does anyone have a complete or near-complete protocol that they would be
willing to share for production of PDMS stamp masters from SU-8? I'm
specifically looking for something that gives bake times, exposure dose,
etc. I would be happy to share back with you the results of transferring
this protocol to our equipment, if those data are interesting.

Thank you,

Alik Widge
MEMS Laboratory
Carnegie Mellon University