Hello All,

I would like to know what kind of CVD processes there is and what parameters one
should use and that kind of practical issues. Can enyone recommend me some kind
of book conserning CVD Processes?

I found this http://www.batnet.com/enigmatics/semiconductor_processing/CVD_Funda
mentals/Fundamentals_of_CVD.html
but I think there is not so much about process parameters and that kind of
practical stuff...


- Sampo Tuukkanen

_______________________________________________________
Sampo Tuukkanen, Room K215, Department of Physics,
PB 35 (YFL), FIN-40014 University of Jyväskylä, FINLAND
E-mail: sampo.tuukkanen@phys.jyu.fi
Tel: +35814 260 2392, Fax: +358 14 260 2351