using poly2 only, i achieve 1000um without initial stiction. But some does
stick after actuated few times

Leow
Universiti Teknologi Malaysia

----- Original Message -----
From: "rakesh babu" 
To: 
Sent: Wednesday, July 02, 2003 10:35 AM
Subject: [mems-talk] Mumps structure length prevent stiction


> hi all,
>
>       I am designing structures using Mumps process .
>
>     what is the maximum length of cantilever and bridge type structures
using both poly1
> and poly2 layers so that stiction does not occur.
>
>  thank you so much for the help.
>
> regards,
> rakesh.
>
>
>
>
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