Hi, I am using RCA-1 to etch Ti. About 10nm per minute.
Yair

-----Original Message-----
From: kris [mailto:crikxo@yahoo.com]
Sent: Tuesday, July 01, 2003 5:49 PM
To: General MEMS discussion
Subject: [mems-talk] Ti Etch


Dear all,

I am trying to etch Ti(300 Angs),which has aluminum
layer underneath it.I have used TiW-30 (25-40C)from
transene.I could see that after some time the Ti etch
rate reduces completely and etch almost stops.I think
due to the formation of Tio2 the etch rate drops.

Can anyone suggest me a good Titanium etchant that
should not attack Al.

Your suggestions are highly helpful.
Thanks
Kris

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