dear Kumar,
maybe you can use soft pad like Suba IV or similar.

What do you want to polish?

Michaela

>-----Ursprüngliche Nachricht-----
>Von: Kumar Soma [mailto:kumar_clk9@yahoo.co.uk]
>Gesendet: Freitag, 4. Juli 2003 16:28
>An: mems-talk@memsnet.org
>Betreff: [mems-talk] Poly polishing slurry
>
>
>
>Dear all,
>
>I am looking for different types of slurry that can be used to
>polish poly. Also any suggestion on type of pad and recipe are
>greatly appreciated. Any information of surface roughness related
>to it will be highly beneficial. Many thanks.
>
>Kumar
>
>
>
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>Subject: [mems-talk] epoxy for fixing fiber on MUMPS
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>i looking for epoxy for fixing optoical fiber on MUMPS device
>
>any recommendation and precaution i should have?
>
>is there any epoxy which is purely UV curable without need of any baking?
>
>