durusmail: mems-talk: Re: Air flow sensor
Re: Air flow sensor
1997-09-23
1997-09-30
Re: Air flow sensor
Felix Mayer
1997-09-30
We are very active in the field of flow sensors. Here a few older examples:


http://iqe.ethz.ch/pel/annrep96/demac.html
http://iqe.ethz.ch/pel/annrep95/p1.11.html
http://iqe.ethz.ch/pel/annrep95/p1.6.html


Newer results are published at MEMS '97:

=46. Mayer, O. Paul, and H. Baltes, "Flip-Chip Packaging for Thermal CMOS
Anemometers", Proc. IEEE Micro Electro Mechanical Systems, (IEEE, 1997)
204-208.


Latest results of a complete microsystem including A/D conversion will be
published at IEDM


http://www.his.com/~iedm/abstract5.html#36.2
36.2 Single-Chip CMOS Anemometer,    F. Mayer, A. Hab=EBrli, H. Jacobs, G.
Ofner, O. Paul and H. Baltes, ETH Hoenggerberg, Zurich,
Switzerland


Products based one these technologies are being commercialized by a ETH
spin-off company. Quantities you requested are no problem to be delivered.

=46or further information please contact:

mayer@iqe.phys.ethz.ch
=46elix Mayer
Physical Electronics Lab
ETH Hoenggerberg, HPT-H16
CH-8093 Zurich
phone   +411 633 24 26
fax     +411 633 10 54






>>
>>     I am looking for a commercially available micromachined (or miniature=
)
>>     air flow sensor for an application requiring about 100, 000 units per
>>     year. Any suggestions.
>>
>>     John Tudor

_________________________
=46elix Mayer
Physical Electronics Lab
ETH Hoenggerberg, HPT-H16
CH-8093 Zurich
phone   +411 633 24 26
fax     +411 633 10 54
_________________________


reply