hi all,
I need a wafer holder, too.

My requriement is to protect the back and the edge of the wafer
but without leaving an residuals an the front side.
I couldn't figure out whether it is possible with the recommended wafer
holders.

regards
Michaela

>-----Ursprungliche Nachricht-----
>Von: Bill Flounders [mailto:bill@eecs.berkeley.edu]
>Gesendet: Montag, 7. Juli 2003 18:21
>An: General MEMS discussion
>Betreff: Re: [mems-talk] Protect backside of Si wafer from TMAH
>
>
>Take a look at:
>http://www.ammt.de/html/wafer_holders.html
>
>Bill Flounders, Ph.D.
>Technology Manager
>Berkeley Microlab
>
>
>Pimpin Alongkorn wrote:
>> Dear Folk,
>>
>> I would like to purchase a wafer holder for wet etching that can protect
>> a backside of wafer from etchant solution such as HF, TMAH and KOH.
>> Could you recommend me a Japan company (or other countries are O.K.)? It
>> will be invaluable help for me. Thank you very much.
>>
>> Alongkorn Pimpin
>> THT laboratory
>>
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>
>
>