Yes, It is possible. We use a home-made stainless steel holder like ammt and it work well all the time. >hi all, >I need a wafer holder, too. > >My requriement is to protect the back and the edge of the wafer >but without leaving an residuals an the front side. >I couldn't figure out whether it is possible with the recommended wafer >holders. > >regards >Michaela > >>-----Ursprungliche Nachricht----- >>Von: Bill Flounders [mailto:bill@eecs.berkeley.edu] >>Gesendet: Montag, 7. Juli 2003 18:21 >>An: General MEMS discussion >>Betreff: Re: [mems-talk] Protect backside of Si wafer from TMAH >> >> >>Take a look at: >>http://www.ammt.de/html/wafer_holders.html >> >>Bill Flounders, Ph.D. >>Technology Manager >>Berkeley Microlab >> >> >>Pimpin Alongkorn wrote: >>> Dear Folk, >>> >>> I would like to purchase a wafer holder for wet etching that can protect >>> a backside of wafer from etchant solution such as HF, TMAH and KOH. >>> Could you recommend me a Japan company (or other countries are O.K.)? It >>> will be invaluable help for me. Thank you very much. >>> >>> Alongkorn Pimpin >>> THT laboratory >>> >>> _______________________________________________ >>> MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list >>> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk >>> Hosted by the MEMS Exchange, providers of MEMS processing services. >>> Visit us at http://www.memsnet.org/ >> >> >> >> > > >_______________________________________________ >MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list >options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk >Hosted by the MEMS Exchange, providers of MEMS processing services. >Visit us at http://www.memsnet.org/ > > ============================================================================ Nga. P.Pham, Ph.D Delft University of Technology Faculty of Electrical Engineering, Mathematics and Computer Science (EEMCS) Delft Institute of Microelectronics and Submicrontechnology (DIMES) Laboratory of Electronic Components, Technology & Materials (ECTM) Feldmannweg 17 P.O Box 5053 2600 GB DELFT THE NETHERLANDS phone ++31-15-2781237 fax ++31-15-2622163 e-mail nga@dimes.tudelft.nl homepage: http://www.dimes.tudelft.nl http://ectm.et.tudelft.nl ============================================================================