Hi everyone,

Thank you all for your help

regards,

derek


----- Original Message -----
From: "Mighty Platypus" 
To: "General MEMS discussion" 
Sent: Monday, July 07, 2003 10:25 PM
Subject: Re: [mems-talk] platinum on SU-8


> Hi Derek,
> Either matel will make a fine adhesion layer. Of the Cr and Ti, Ti tends
> to have a lower stress, but it is susceptible to HF.
>
> Jesse Fowler
>   UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
>   Los Angeles, CA 90095-1597 | (310)825-3977
> "Observations of nature, no matter how seemingly arcane, are like
> peeling off one more layer from the great onion of knowledge"
>     -- Don Petit, ISS science officer
>
> On Mon, 7 Jul 2003, Chen-Han Lee wrote:
>
> > Hi everyone,
> >
> > thank you all especially Kirk and Bob,
> > you mention a adhesive layer for sputter platinum on silicon wafer
> > what material should i use? Will Ti or Cr do the job?
> > One more question, can i sputter gold on silicon wafer?
> >
> > Derek
> > 7/7/03
> >
> > ----- Original Message -----
> > From: "Kirt & Erika Zipf-Williams" 
> > To: "General MEMS discussion" 
> > Sent: Thursday, July 03, 2003 7:25 PM
> > Subject: Re: [mems-talk] platinum on SU-8
> >
> >
> > > > Good day everyone,
> > > > I am a research student in U.K.
> > > > Could anyone please tell me wome ways i can deposite platinum film
on
> > > SU-8?
> > > > Any suggestions are welcomed.
> > > > Thank you for your time.
> > > > Chen-Han Lee
> > >
> > > You can sputter or evaporate platinum.
> > > Don't forget to use an adhesion layer.
> > >
> > >     --Kirt Williams, Ph.D.   consultant
> > >
> > >
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> >
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>
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