Hello,

I'm working on an optical sensor integrated on silicon with phase
modulation driven by acoutic surface waves (ZnO piezoelectric thin
film)on the reference arm.
The architecture of this sensor is a Mach-Zehnder interferometer and in
order to isolate the measurement arm, I need an acoustic absorber. Until
now, I just realised an isolation trench by deep RIE etching.

Could someone help me ?

Thanks


--
Dr. Eric Bonnotte
LIMMS/Kawakatsu laboratory / CNRS/IIS-The University of Tokyo
7-22-1 Roppongi Minato-ku Tokyo 106 JAPAN
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E-mail : ebon@cc.iis.u-tokyo.ac.jp