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Date: Wed, 01 Oct 1997 17:27:19 -0700
From: Atmane Bentayeb 
Organization: Ericsson Components
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Subject: Bubles in SVG developer track!
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Hi everybody!

We are having bubles in SVG developer track, especially near the edges
of the wafer and their number decreases as one goes to the center of the
wafer. We are using 4" wafers. The developing step is carried out with
the puddle development, followed by both spray and puddle  for the rinse
step(10seconds at 1000rpm). The recipe is ended with a dry spin step for
20s(10s at 2krpm and the other 10s at 50krpm).
we have checked if there is any leak in the pump, but found nothing. =

The positives resist we are using are:
AZ 6612, AZ 6618 and AZ 1512.(thicknesses ranging from 10600=C5 to
22000=C5).
Could anybody outhere help us to to fixe this problem? we are grateful
for any kind of help, ideas smart recipes etc..

Thanks in advance
Atmane Bentayeb from
Ericsson Components in
Sweden.
E-mail
ekabeat@eka.ericsson.se

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