Hi All, I've done some experiment about silicon to glass anodic bonding. The bonding was performed at temperature 400 C and 600 V, however it's followed by the increasing of the current, exceeding 10 mA and then I found that my p-100 silicon and corning glass was cracked and broken, but the bonding is still occured. I use stainless plate and gold needle probe to apply the voltage. The silicon wafer and glass was cleaned using acetone cleaning. Could someone help me explaining this ? Every comment would be appreciated. Best regards, mamien