durusmail: mems-talk: Adhesion layer for sapphire?
stress relaxation by backside etch?
2003-08-12
2003-08-13
Adhesion layer for sapphire?
2003-08-13
Humidity sensors in MEMS
2003-08-27
2003-08-13
Adhesion layer for sapphire?
Mark Fuller
2003-08-13
I am trying to get a good bond between Indium and sapphire.
I am currently using sputtered Ti as an adhesion layer.
The adhesion layer is failing in a following thermal cycle.
Any suggestions as to what would work better?

--
Mark Fuller
Microelectronics Fabrication Facility
Washington State University
Dana Hall 102
Pullman, WA  99164-2711
(509)335-1797

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