durusmail: mems-talk: CEM
CEM
1997-10-30
CEM
Star Lab317
1997-10-30
Hi everybody:

     Does anyone know where to buy the MicroSi, CEM 388S?
The 'CEM' means Contrast Enhancement Material. It is used following
the PR. I know the CEM from papers. In general it is used in submicro-um

process. But it also work well for the high aspect ratio process. If
somebody
know the telephone or Fax of the MicroSi, please let me know.

     Thanks a lot.

Ching-Piao Chang
HsingHua University Electrical Engineering MEMS Lab


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