Hey A.K.,
We haven't used pyrex, but I know that PECVD and low temperature LPCVD
oxide (LTO) both work fine on borofloat glass. I suspect pyrex will work
just as well. The only possible problem may be that the pyrex *might* not
be able to handle the temperature of LTO (about 450 C). You should have
some specififcations about the maximium temperature your glass can
withstand.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Facts are stubborn, but statistics are more pliable."
   -- Mark Twain

On Tue, 19 Aug 2003, A.K.Ismail wrote:

> Dear all,
>
> Does anybody know if a low temperature CVD oxide (i.e LPCVD or PECVD) can be
> deposited on Pyrex substrate?. I would like to know if this CVD oxide can have
> a good adhesion to pyrex. I found in literature almost people deposited CVD
> oxide on Si substrate. I am expecting that it can have a good adhesion since
> pyrex is also an oxide. Could anyone who has experience about this process can
> confirm to me.
>
> Thank you.
>
> A.K.Ismail.
>
>
>
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