Cr can be used as an adhesion layer on silicon nitride.
Cr+Au can be used as a mask for KOH etching, so it is compatible.
    --Kirt Williams, Ph.D.   consultant

----- Original Message -----
From: Nikhil Mehta 
To: 
Sent: Sunday, August 24, 2003 1:30 PM
Subject: [mems-talk] coating on Silicon Nitride to deposit Gold


> hi:
> We at present are do a titanium coating on Silicon Nitride on which we
deposit Gold (as gold does not stick to Nitride). I am looking for
literature to find if we can replace titanium with any other material on
which we can deposit Gold and at the same time this material is not
sensitive to KOH etching (Titanium is sensitive to KOH etching).
>
> I tried to find some literature on this but no success. Can any one help
me in my dilemma
>
> thanks
>
> Nick
> Graduate Student
> Auburn University
>
>
>
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