I've had this problem before. It was alleviated when I cleaned the mask
and chuck. Maybe you already did this, and felt it was too trivial to
mention in the problem statement. If so, find out if the chuck will hold
other masks. If so, find a glass plate the chuck will hold and use that
one with your transparency. Hell, you may be able to use the glass plate
you have if you just flip it over.

It may be that someone dropped the chuck, and it is now too warped to hold
a mask. If that's the case, life's going to suck until you can get another
chuck from KS.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Facts are stubborn, but statistics are more pliable."
   -- Mark Twain

On Tue, 26 Aug 2003, Li Wang wrote:

> Hi everyone,
>
> I met a problem when I use the mask aligner. The aligner is Karl Suss MA6.
> It's pretty new one. The mask is a glass plate with transparency sheet on.
> The problem is that I can't hold the mask. It always say that mask vacuum
> is off. I checked the pipe and connection and they are sealed well. The
> only problem is the sealing between the mask and chunk. I tried to press
> the mask but still had the same problem. It seems the chunk design  from
> the manufacturer has some problem. But I doubt it. Are there anyone who had
> this kind of problem before?
>
> Thanks
>
> Li Wang
> Carnegie Mellon University
> 412-2682514
>
>
>
>
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