durusmail: mems-talk: Underetch Measurement
Underetch Measurement
2003-09-04
2003-09-05
Underetch Measurement
Tom Fan
2003-09-04
Hi All,

I am wondering how people measure the magnitude of underetch when doing an
isotropic wet etch of glass substrates (whether using PR or metals as etch
masks)? Is it by using the SEM?

Thanks,
Tom Fan

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