A couple of weeks ago I posted the message below in response to a request
for information about deep silicon etchers.  I received a lot of requests
for copies of the slides to Pete's talk.  The slides are now online at:

http://fatmac.ee.cornell.edu/~phart/avstalk

-John

----------------
John Chong
jmc4@cornell.edu
----------------

---------- Forwarded message ----------
Date: Mon, 13 Oct 1997 15:12:52 -0400 (EDT)
From: John Matthew Chong 
To: mems@isi.edu, M Y Loke 
Subject: Silicon deep trench etcher (fwd)


Hi,

        We at Cornell have been using Plasmatherm's deep Si etcher for
almost a year now and are very happy with it.  Many in our group have
switched from Cl2-based vertical etching to use of the deep etcher for our
processes.  One member of our group, Pete Hartwell, is giving a talk at
this month's AVS conference in San Jose, CA detailing our experiences with
it.  If you want, we can send you copies of the slides.  Also, feel free
to contact us directly if you have any questions.  Our contact info is
given on the following page along with some early pictures of stuff we did
with the machine:

http://kale.ee.cornell.edu/fred/plasmatherm/Plasmatherm.html

- John