durusmail: mems-talk: Vacuum pressure sensor
Vacuum pressure sensor
1997-11-05
Vacuum pressure sensor
Rose Zhang
1997-11-05
Hello everybody,

We are looking for vacuum pressure sensors in die form that can be
wire-bonded in a small vacuum package to monitor the absolute pressure. The
pressure range is from 1e-4 torr to atmosphere. Does anyone have any idea
where we can get one? We wouldn't mind even if they are only prototypes.

Thanks!

Rose Zhang
Photonic materials & processes
National optics institute
Quebec, Canada
Tel:(418)657-7006
Fax:(418)657-7009


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