Dear MEMSers,
I need to use TMAH etch Si for just 2-3 microns, but want to be as smooth
as possible.
Dose anyone know what the concentration and temperature is good for
processing?
I searched online and noticed some solution
is mixed with water and some with Methanol.What is the difference between
them?

By the way,is there any special concern about store and disposing it after
processing?
Thanks a lot!


DL

_________________________________________________________________
免费下载 MSN Explorer:   http://explorer.msn.com/lccn/