Hey folks, Just to add the little I know into this question. SF6 tends to leave a film on the inside of your chamber. I use it to etch Tungsten. I also use the system (Trion minilock RIE) to etch III-V material. We have found that doing a high power, high flow O2 run for 5 to 10 minutes after every SF6 run helped keep our chamber nice and clean between runs. Brent "Blunier, Stefan" wrote: > Hi Jim > It seems that everybody having a Si etching systems is very anxious to > try. I haven't got any reply on my question. > Greetings > Stefan > > -----Original Message----- > From: Jim Beall [mailto:beall@boulder.nist.gov] > Sent: Montag, 15. September 2003 16:23 > To: General MEMS discussion > Subject: Re: [mems-talk] SF6 Glas etching > > Stefan - > > I wonder if you ever received any useful information in response to > this inquiry? > > We also have an STS ASE system and were told to never do anything > else so as to not disturb the chamber chemistry, but I wonder how > critical this really is. > > Thanks, > > Jim > > >Dear colleagues > >>From the publication of Ichiki et al. Thin Solid Films 435 (2003) > >>62-68 > >I learned that glas > >etching with SF6 and Ar works quiet well. When we bought 4 years ago a > >ICP system (STS) for Si deep etching and a RIE system for glas (resp > >SiO2, Si3N4) etching we were told from STS not to do > >both processes in the same chamber because of reproducibility. > >Does anyone has experience in running glas etch (SF6/Ar) and silicon > >deep etching > >on the same ICP system. Do I contaminate the si deep etching chamber by > >glass etching > >or is it possible to clean up the system without open it (no mechanical > >clean)? > > > >Thanks for response. > >Greetings > >Stefan > > -- > > - Jim Beall 303-497-5989 > beall@boulder.nist.gov > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/ > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/