Are there anyone who can tell me the model of the equipment you are now using?
I want to find three equipments for MEMS application:
ICP, PECVD and Magnetron sputter(for several kinds of metal oxide deposition)
Thank you very much
If you know, please reply to my mailbox: s.shi@suss.com.cn

Simon Shi
_____________________
Suss MicroTec AG
Shanghai Rep. Office
Room 606, Nanzheng Building
580 Nanjing W. Road
200041 Shanghai
Tel.+86-21-52340432
Fax:+86-21-52340430
email: s.shi@suss.com.cn