Transene Company manufactures BD Etchant for PSG and BSG films. The
etch rate is as follows:
1.85 angstroms/sec at 20 oC
2.47 angstroms/sec at 25 oC
3.35 angstroms/sec at 30 oC
Please visit our website, www.transene.com, for more information on BD
Etchant or contact me directly.
Christopher Christuk
Transene Company
Tel: 978 777 7860
Fax: 978 739 5640
Email: Christopher@transene.com
-----Original Message-----
From: bobo [mailto:xuemengchen@mail.sim.ac.cn]
Sent: Saturday, September 20, 2003 2:48 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] BSG etch rate
hi everybody:
does anybody knows the etch rate of predeposition grown BSG in BHF or
10:1 HF?
regards
boboFrom s.shi@suss.com.cn Sat Sep 20 10:52:31 2003
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Subject: [mems-talk] Help for semiconductor equipments
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Are there anyone who can tell me the model of the equipment you are now
using?
I want to find three equipments for MEMS application:
ICP, PECVD and Magnetron sputter(for several kinds of metal oxide
deposition)
Thank you very much
If you know, please reply to my mailbox: s.shi@suss.com.cn
Simon Shi
_____________________
Suss MicroTec AG
Shanghai Rep. Office
Room 606, Nanzheng Building
580 Nanjing W. Road
200041 Shanghai
Tel.+86-21-52340432
Fax:+86-21-52340430
email: s.shi@suss.com.cn