durusmail: mems-talk: e-beam evaporation of Pt
electroforming (Ni)
e-beam evaporation of Pt
2003-09-25
2003-09-29
e-beam evaporation of Pt
Honggang Jiang
2003-09-25
Hi all:
I have been using vitreous carbon crucible liner for Pt e-beam evaporation, and
encounted
carbon crucible liner cracking and flaking problems. It is both time consuming
and costly to recover the Pt left in a cracked carbon cruciable liner. I wonder
if there are other options here, like
-- directly putting Pt on Cu hearth or
-- using tungsten cruciable liner or other liners instead of vitreous carbon.
I would appreciate your help. Thanks
Honggang Jiang

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Honggang Jiang, PhD

Materials Science Engineer

Second Sight

12744 San Fernando Road

Building 3

Sylmar, CA 91342

Ph: 818 833 5058

Fx: 818 833 5067

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