durusmail: mems-talk: photoresists wavelength
photoresists wavelength
1997-11-14
photoresists wavelength
Stefan Fiedler
1997-11-14
Dear collegues,
please, help to find some systematic information on photoresist
materials (both, positive and negative).  A listing of different resist
materials by wavelength used would be helpfull.
Are there resists available, sensitive in the visible spectrum too?
Thank you for assistance.
Stefan

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 Fraunhofer-Institut fuer               Dr. Stefan Fiedler
 Zuverlaessigkeit u. Mikrointegration   Telefon +49 (0) 30/46403-276
 Gustav-Meyer-Allee 25                  Telefax +49 (0) 30/46403-271
 13355 Berlin                           e-mail  fiedler@izm.fhg.de
 Germany
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