Dear colleagues I'm looking for some information about development of the double sided photolithography process in wafer technology. Can anybody help me and give me some details about the beginnings, the inventors and so on? Yours sincerely Andreas Albrecht -- Transferzentrum Mikroelektronik e.V. In den Weiden 7 D-99099 Erfurt Tel. +49-(0)361-44 20 660 Fax +49-(0)361-44 20 666