durusmail: mems-talk: Cantilever beams sticking
Cantilever beams sticking
Cantilever beams sticking
IRWIN RONDA SUSAN
1997-11-16
Hi,

I am working with cantilever beams that have a large plate on the end that
is one-half of a parallel plate capacitor.  I  can close the capacitor
using the electrostatic pull-in voltage, but the capacitor will not
seperate when the voltage is turned off, even if the capacitors are
connected directly to gound.

Has anyone else experienced this problem and/or do you have any
suggestions.

Thanks,

Ronda Irwin


reply