durusmail: mems-talk: polishing of silicon
polishing of silicon
2003-10-10
2003-10-13
polishing of silicon
Kim Norris
2003-10-13
You can find assistance from Virginia Semiconductor at 540-373-2900

-----Original Message-----
From: sandhya [mailto:sandhyareddys@yahoo.com]
Sent: Friday, October 10, 2003 6:42 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] polishing of silicon


Hello all,
Can anyone say what are chemicals usually used to polish ultra thin surfaces and
where can I find papers or journals related to this topic.
Thanks
sandhya


Sandhya Reddy
Research assistant
Boise state university
Ph.No. 208-426-5639

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