You will find the stirring will help the temperature uniformity within the
bath to ensure you get a uniform etch.  You should also put a condenser/lid
over the bath to maintain the concentration of KOH is solution.

Eric Miller
----- Original Message -----
From: "Liwei Wang" 
To: 
Sent: Friday, November 07, 2003 2:18 PM
Subject: [mems-talk] Magentic stir in KOH etching


> Dear all:
>
> I am setting up a KOH etching station right now for deep etching Si
> (etch through the 500um wafer).I plan to have a constant temperature
> bath, a beaker, and a nice wafer holder to protect the backside of the
> film. my concern will be that do I need to have a magnetic stir set up
> in this KOH etching system? because it will be at least 10 hours
> etching, if so, how I gonna make it work? Put a magnetic plate in the
> water bath? or underneath the whole bath? does anyone have any
> experience or suggestions?
>
> Thank you so much in advance.
> Wish everybody have a nice weekend.
>
> Ivy
>
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