durusmail: mems-talk: Chrome film disappeared in HF
Chrome film disappeared in HF
2003-11-10
Chrome film disappeared in HF
Yilei Zhang
2003-11-10
Hi all,
I just finished one experiment and found that the chrome layer (300nm)
disappeared in HF (49%) in one minute. Is that because that chrome doesnot
adhere well to the silicon substrate?

Another possible source may be the 300nm SiO2 layer between Chrome and Si
substrate in certain area. But the feature (in mm scale) should be large
enough to avoid lift off caused by undercutting.

Any other reason? Thanks.

Regards,
Yilei Zhang










reply