Jan, Try Bullen Ultrasonics, Inc. in Eaton, Ohio, USA. They have done ultrasonic drilling for us in both silicon and glass. Their number is 513-456-7525. Best of luck. Brent E. Burns Integrated Micro Sensors Group Northrop Grumman ESID Hawthorne, CA Brent_Burns@ccmail.northgrum.com ______________________________ Reply Separator _________________________________ Subject: Ultrasonic drilling Author: Jan Kowalat INTERNET Date: 2/6/97 4:26 PM Does anyone know where I can get ultrasonic machining of glass and silicon done? Typically, I need large numbers of holes in the sub-millimetre range drilled into 3" and 4" substrates, up to 1mm thick. -- Jan Kowal Applied Microengineering Ltd 68 Milton Park Abingdon, Oxfordshire, UK Tel: +44 (0)1235 833934 Fax: 833935 e-mail: kowal@aml2.win-uk.net