Hi Jo-Ey,

Hionix (www.hionix.com) can certainly do the stack and provide you with the
wafers. Please let me know if your exact specifications and quantity.

If you need any further information please don't hesitate to call me at
408-910-8070.

Thanks
Ravi

-----Original Message-----
From: Jo-Ey (Joey) Wong [mailto:joeywong@alum.mit.edu]
Sent: Tuesday, November 11, 2003 1:14 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] wafers & thin films


Hi,

I am looking for vendors who could supply small
quantities of 4" wafers with film stack of 200 nm
thermal oxide, 250 nm of aluminum, and 1.5 um of
silicon.

    -----------
    1.5 um Si
    -----------
    250 nm Al
    -----------
    200 nm SiO2
    -----------
    4" Silicon
    Substrate
    -----------

Please email suggestions and comments to
"joeywong@alum.mit.edu". Thank you!

Jo-Ey Wong


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