durusmail: mems-talk: Etching Simulator
Etching Simulator
2003-11-23
2003-11-25
Etching Simulator
Choe,S-H
2003-11-23
Dear All;

Hello, I am looking for Silicon Wet Etching Simulator.
I am now trying to make a very sharp tips with the help of
Silicon isotropic wet etching.

Before I begin to proceed real process, I want to see the
expecting results and change the mask design if it is necessary.

I have tried the ACES, but it can not provide the exact mask designing.

If you have some good etching simulator, please tell me where I could get
it.

Thanks.

Choe,S-H
Esashi Laboratory, Tohoku University
E-Mail: choe@mems.mech.tohoku.ac.jp
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