Halo Everybody,

  I would like to know whether it is possible to achieve a stroke or
displacement of 50µm and above using a silicon membrane acting as a top
electrode of electrostatic actuator which is an integral part of  µvalve.Please
reply me about the approximate dimensional requirements and voltage
requirements,if you know as well.

Thanks in advance and expecting your earnest reply.

Regards,
Venkat
TUHH,Germany

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