usually you will need high voltages for electrostatic
actuators about 30V or above. In some cases near near
60 or 70 V. YOu can ground Si membrane and apply
voltage or current to the actuator. It should move. If
you apply current the actuator will expand and it
should give your some displacement. But try to apply
current small like in mA.
Imran
--- venkataragavalu sivagnanam
 wrote:
> Halo Everybody,
>
>   I would like to know whether it is possible to
> achieve a stroke or displacement of 50µm and above
> using a silicon membrane acting as a top electrode
> of electrostatic actuator which is an integral part
> of  µvalve.Please reply me about the approximate
> dimensional requirements and voltage requirements,if
> you know as well.
>
> Thanks in advance and expecting your earnest reply.
>
> Regards,
> Venkat
> TUHH,Germany
>
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