Yes, there is one IntelliSuite CAD for MEMS software
in which you will find this process flow.
Imran
--- "Choe,S-H"  wrote:
> Dear All;
>
> Hello, I am looking for Silicon Wet Etching
> Simulator.
> I am now trying to make a very sharp tips with the
> help of
> Silicon isotropic wet etching.
>
> Before I begin to proceed real process, I want to
> see the
> expecting results and change the mask design if it
> is necessary.
>
> I have tried the ACES, but it can not provide the
> exact mask designing.
>
> If you have some good etching simulator, please tell
> me where I could get
> it.
>
> Thanks.
>
> Choe,S-H
> Esashi Laboratory, Tohoku University
> E-Mail: choe@mems.mech.tohoku.ac.jp
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