Dear Bernd, Brewer Science offers a material call PiRL that works quite well for metal lift-off. You can find information on PiRL at http://www.brewerscience.com/sm/sm_tech_info.html . Regards, Shane "Krueger, Bernd (Unaxis Optics BZ)" wrote: > Dear All, > > does anybody has experience in a metal-lift-off-process? I am searching for > a resist working fine for soft metal with a thickness of about 300nm. May be > you can advise me either negative or positive resists. > > I would appreciate any help, > Thanks in advance, > > Bernd Krueger > > > Manager Engineering, OPO > > mailto:bernd.krueger@unaxis.com > > > > Unaxis Balzers Ltd. > > Division Optics > > P.O. Box 1000 > > FL-9496 Balzers / Liechtenstein > > Tel. +423 / 388 4932 > > Fax. +423 / 388 5185 > > > > Unaxis Optics - > > the future of Balzers Thin Films > > > > http://www.optics.unaxis.com > > > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/