I used STR 1045 negative PR ( at 2250rpm: thickness 6um) to lift-off 400nm Au with PR stripper at 70 degrees C. Works great. Hope this helps. ShuTing ShuTing Hsu Graduate Student Researcher Integrated Photonics Laboratory UCLA EE Department 420 Westwood Plaza, 63-128 Eng 4 Los Angeles, CA 90095 Tel: (310) 825-7338 Fax: (310) 794-5513 Email: shuting@icsl.ucla.edu -----Original Message----- From: mems-talk-bounces+shuting=ucla.edu@memsnet.org [mailto:mems-talk-bounces+shuting=ucla.edu@memsnet.org] On Behalf Of Krueger, Bernd (Unaxis Optics BZ) Sent: Wednesday, December 03, 2003 9:00 AM To: 'mems-talk@memsnet.org' Subject: [mems-talk] Lift-Off Dear All, does anybody has experience in a metal-lift-off-process? I am searching for a resist working fine for soft metal with a thickness of about 300nm. May be you can advise me either negative or positive resists. I would appreciate any help, Thanks in advance, Bernd Krueger > Manager Engineering, OPO > mailto:bernd.krueger@unaxis.com > > Unaxis Balzers Ltd. > Division Optics > P.O. Box 1000 > FL-9496 Balzers / Liechtenstein > Tel. +423 / 388 4932 > Fax. +423 / 388 5185 > > Unaxis Optics - > the future of Balzers Thin Films > > http://www.optics.unaxis.com > _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/